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High Purity Chemical Liquid Valve/Air Operated, Integrated Fitting Type LVC
Chemical Liquid Valves/Fittings & Needle Valves/Tubing ? Chemical Liquid ValvesFluoropolymer Equipment/PVC Equipment ? High Purity Chemical Liquid Valves
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?Body material: New PFA
?N.C./N.O./Double acting all feature the same configuration.
?Compatible with fluid temperatures of 100℃
?Manifold type no.: LLC2, LLC3, LLC4, LLC5
| Series | Type | Valve type | Applicable tubing O.D. | Orifice diameter (mm?) |
|---|---|---|---|---|
| LVC | Air Operated Integrated fitting | N.C./N.O./ Double acting | Metric: 3 to 25 Inch: 1/8 to 1 | 4 to 22 |
High Purity Chemical Liquid Valve/Air Operated, Threaded Type LVA
Chemical Liquid Valves/Fittings & Needle Valves/Tubing ? Chemical Liquid ValvesFluoropolymer Equipment/PVC Equipment ? High Purity Chemical Liquid Valves
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?Body materials: New PFA/Stainless steel/PPS
?Diaphragm materials: PTFE, EPR, or NBR can be selected.
?Organic solvents compatible
Body: Stainless steel, Actuator section: ADC, Buffer: Choose from FKM/EPDM
?Manifold type no.: LLA2，LLA3，LLA4，LLA5
| Series | Type | Valve type | Port size Applicable tubing O.D. | Orifice diameter (mm?) |
|---|---|---|---|---|
| LVA | Air operated Threaded type | N.C./N.O./ Double acting | 1/8 to 1 | 2 to 22 |
| LVA | Air operated Organic solvents compatible | N.C./N.O./ Double acting | Metric: 6 to 19 Inch: 1/4 to 1 | 4 to 22 |
High Purity Chemical Liquid Valve/Manually Operated (Integrated Fitting Type/Threaded Type) LVH
Chemical Liquid Valves/Fittings & Needle Valves/Tubing ? Chemical Liquid ValvesFluoropolymer Equipment/PVC Equipment ? High Purity Chemical Liquid Valves
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?Body materials: New PFA/Stainless steel/PPS
?Compatible with locking and non-locking types
?Organic solvents compatible
Body: Stainless steel, Actuator section: ADC, Buffer: Choose from FKM/EPDM
?Manifold type no.: LLH2，LLH3，LLH4
| Series | Type | Valve type | Port size Applicable tubing O.D. | Orifice diameter (mm?) |
|---|---|---|---|---|
| LVH | Manually operated (Integrated fitting/Threaded type) | N.C. | Threaded type: 1/8 to 1/2 Integrated fitting: Metric: ?3 to ?12 Inch: 1/8 to 1/2 | 4 to 12 |
| LVH | Manually operated Organic solvents compatible | N.C. | Metric: 6 to 19 Inch: 1/4 to 1 | 4 to 22 |
Compact Type High Purity Air Operated Chemical Liquid Valve LVD
Chemical Liquid Valves/Fittings & Needle Valves/Tubing ? Chemical Liquid ValvesFluoropolymer Equipment/PVC Equipment ? High Purity Chemical Liquid Valves
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?Space saving, compact model is available.
Dimension across inlet/outlet ports: Reduced by up to 29%
?Body material: New PFA
?Diaphragm material: PTFE
?Actuator materials: PPS, PVDF (LVD-F/FN)
Note) Tubing O.D. for the tube extension type
Safety Instructions Series Variations Work Procedure Instructions/LQ1, 2 Fitting Procedure/LQ3 Green Procurement (RoHS)
| Series | Type | Valve type | Applicable tubing O.D. Note) Metric size | Applicable tubing O.D. Note) Inch size | Orifice diameter (mm?) |
|---|---|---|---|---|---|
| LVD | Integrated fittings | N.C./N.O./ Double acting | 3 to 19 | 1/8 to 3/4 | 2 to 16 |
| LVD | Tube extensions | N.C./N.O./ Double acting | 6 to 19 | 1/4 to 3/4 | 4 to 16 |
| LVD-F/FN | LQ1 Integrated fittings | N.C./N.O./ Double acting | 3 to 25 | 1/8 to 1 | 4 to 22 |
| LVD-F/FN | LQ3 Integrated fittings | N.C./N.O./ Double acting | 6 to 25 | 1/4 to 1 | 4 to 22 |
| LVD-F/FN | Tube extensions | N.C./N.O./ Double acting | 6 to 25 | 1/4 to 1 | 4 to 22 |
High Purity Chemical Liquid Valve/Air Operated, Non-Metallic Exterior LVQ
Chemical Liquid Valves/Fittings & Needle Valves/Tubing ? Chemical Liquid ValvesFluoropolymer Equipment/PVC Equipment ? High Purity Chemical Liquid Valves
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?Screwless construction, Non-metallic construction doesn't use metal
screws to secure the body of the actuator
?Body material: New PFA
?Diaphragm material: PTFE
?Actuator material: PVDF
Note) Tubing size
* The LQ2 insert/integrated fitting type space-saving fitting for
the LVQ series high-purity chemical liquid valve is to be
discontinued as of March 2025. Select the LQ1 fitting instead.
Safety Instructions Series Variations Work Procedure Instructions/LQ1, 2 Fitting Procedure/LQ3 Green Procurement (RoHS)
| Series | Type | Valve type | Applicable tubing O.D. Metric size | Applicable tubing O.D. Inch size | Orifice diameter (mm?) |
|---|---|---|---|---|---|
| LVQ | Integrated fitting | N.C./N.O./ Double acting | 3 to 25 | 1/8 to 1 | 4 to 22 |
| LVQ | Space saving type | N.C./N.O./ Double acting | Fitting size: 2 to 6 | Fitting size: 2 to 6 | 4 to 22 |
| LVQ | Tube extension | N.C./N.O./ Double acting | 6 to 25 Note) | 1/4 to 1 Note) | 4 to 22 |
Fluoropolymer Fittings/Hyper Fittings/Insert Bushing Type LQ1
Chemical Liquid Valves/Fittings & Needle Valves/Tubing ? Fittings/Needle ValvesFluoropolymer Equipment/PVC Equipment ? Fittings & Needle Valve/Tubing
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?Material: New PFA
?Quadruple-seal construction
?The reducer method allows for tubing size changes without replacing the body.
| Series | Max. operating pressure | Operating temperature (℃) |
|---|---|---|
| LQ1 | 1.0 MPa | 0 to 200 |
Fluoropolymer Fittings/Hyper Fittings/Flare Type LQ3
Chemical Liquid Valves/Fittings & Needle Valves/Tubing ? Fittings/Needle ValvesFluoropolymer Equipment/PVC Equipment ? Fittings & Needle Valve/Tubing
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?Material: New PFA
?Triple-seal construction
?Easy installation
| Series | Max. operating pressure | Operating temperature (℃) |
|---|---|---|
| LQ3 | 1.0 MPa | Nut material PVDF: 0 to 150 Nut material PFA: 0 to 200 |
High Purity Fluoropolymer Needle Valve LVN
Chemical Liquid Valves/Fittings & Needle Valves/Tubing ? Fittings/Needle ValvesFluoropolymer Equipment/PVC Equipment ? Fittings & Needle Valve/Tubing
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?Material: New PFA
?Fitting integrated, all-in-one structure
Uses Hyper fittings/LQ2 series
?Triple-seal construction
| Series | Applicable tubing O.D. Metric size | Applicable tubing O.D. Inch size | Flow adjustment range (L/min) | Orifice diameter (mm?) |
|---|---|---|---|---|
| LVN | 4 to 12 | 1/8'' to 1/2'' | 0 to 12 | 4.4 to 10 |
Fluoropolymer Bore Through Connector LQHB
Chemical Liquid Valves/Fittings & Needle Valves/Tubing ? Fittings/Needle ValvesFluoropolymer Equipment/PVC Equipment ? Fittings & Needle Valve/Tubing
Fittings and Tubing ? Fittings for Special Environments(Clean/Fluoropolymer)
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?It is possible to freely choose the tube’s positioning. As the tube runs through the fitting itself, a setting is available for any optional position.
?Can be used in the pressure feeding of chemical liquids, etc., during the production process of semiconductors
?Applicable to chemical liquids such as acid, alkali, and deionized water
?Materials: New PFA (Body, nut), PTFE (Collet)
| Series | Applicable tubing O.D. Metric size | Applicable tubing O.D. Inch size | Operating temperature (℃) |
|---|---|---|---|
| LQHB | φ3 to φ25 | φ1/8'' to φ1'' | 0 to 200 |
Clean Regulator/Fluororesin Type SRF
Modular F.R.L./Pressure Control Equipment ? RegulatorsFluoropolymer Equipment/PVC Equipment ? Fluororesin Regulators
Pressure Control Equipment ? Regulators
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?Wetted parts Body: New PFA, Diaphragm: PTFE
?Recommended maximum flow rate: 20 L/min (SRF50),
(Inlet pressure: 0.3 MPa, Fluid: Water)
Safety Instructions F.R.L. Units/Precautions Series Variations/Pressure Control Equipment
Product Selection Guide Green Procurement (RoHS)
Product Selection Guide Green Procurement (RoHS)
| Series | Type | Applicable tubing O.D. Metric size | Applicable tubing O.D. Inch size | Set pressure (MPa) |
|---|---|---|---|---|
| SRF | Integrated with fitting | φ4 to φ19 | φ1/8 to φ3/4 | 0.02 to 0.4 |
| SRF | With nut | Fitting size：2 to 6 | Fitting size：2 to 6 | 0.02 to 0.4 |
| SRF | Tube extension | - | Tubing O.D. φ1/4 to φ3/4 | 0.02 to 0.4 |
Fluoropolymer Tubing TL/TIL
Chemical Liquid Valves/Fittings & Needle Valves/Tubing ? TubingFluoropolymer Equipment/PVC Equipment ? Fittings & Needle Valve/Tubing
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?Material: Super PFA
?Operating temperature (fixed usage): ?65 to 260°C
＊Made to order
| Series | Tubing O.D. Metric | Tubing O.D. Inch | Color |
|---|---|---|---|
| TL/TIL | 4，6，8，10，12，19 | 1/8''，3/16''，1/4''，3/8'' 1/2''，3/4''，1'' | Translucent |
FEP Tubing (Fluoropolymer) TH/TIH
Chemical Liquid Valves/Fittings & Needle Valves/Tubing ? Tubing
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?Maximum operating pressure: 2.3 MPa (at 20°C)＊
?Food Sanitation Law compliant
?Compliant with the FDA’s (Food and Drug Administration)
§ 177.1550 dissolution test
?Operating temperature (fixed usage): Air, Inert gas: -65 to 200°C
Water: 0 to 100°C (No freezing)
＊This may vary according to size.
| Series | Tubing O.D. Metric size | Tubing O.D. Inch size | Color |
|---|---|---|---|
| TH/TIH | φ4, φ6, φ8, φ10, φ12 | φ1/8''，φ3/16''，φ1/4''，φ3/8''，φ1/2''，φ3/4'' | Translucent, Black, Red, Blue |
Soft Fluoropolymer Tubing TD/TID
Chemical Liquid Valves/Fittings & Needle Valves/Tubing ? TubingFluoropolymer Equipment/PVC Equipment ? Fittings & Needle Valve/Tubing
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?Maximum operating pressure: 1.6 MPa (at 20℃)＊
?Food Sanitation Law compliant
?Compliant with the FDA's (Food and Drug Administration)
§ 177.1550 dissolution test
?Operating temperature (fixed usage): Air, Inert gas: ?65 to 260°C
Water: 0 to 100°C (No freezing)
＊This may vary according to size.
| Series | Tubing O.D. Metric | Tubing O.D. Inch | Color |
|---|---|---|---|
| TLM/TILM | φ4，φ6，φ8，φ10，φ12 | φ1/8''，φ3/16''，φ1/4''，φ3/8''，φ1/2'' | Translucent |
